Industriering 4a ? D-85238 Petershausen ? Germany ? Tel +49-8137-935-0 ? Fax +49-8137-935-235 www.camline.com LineWorks SPACE User Training Revision 6.1 01 / 2010 The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors which may appear in this document. All company names and product names are trade- marks or registered trademarks of their respective holders. The following are trademarks of camLine Datensys- teme für die Mikroelektronik GmbH: ?camLine ?CAPS ?LineWorks ?LineWorks ECoFrame ?LineWorks PULSE ?LineWorks PR ?LineWorks RM ?LineWorks SPACE ?LineWorks WIP ?LineWorks UA Revision 6.1 01 / 2010LineWorks SPACE User Training1 Contents 1SPACE Basics 1-1 1.1Target. 1-1 1.2Basic Terms . 1-1 1.3Example Scenario for a General Application. 1-2 1.3.1Creating the ’Diffusion’ LDS Folder 1-2 1.3.2Creating the ’TrenchOxid-180’ SPC Channel 1-3 1.3.3Collecting and Sending Samples 1-4 1.3.4Spec Limit Checks for the SPC Channel ’TrenchOxid-180’. 1-5 1.3.5Sending a Sample with Spec Violation 1-5 1.4Working with SPACE Monitor. 1-7 2Configuration of SPC Channels, Part I 2-1 2.1Targets. 2-1 2.2Basic Terms . 2-1 2.3SPC Channels. 2-2 2.4Creating the Parameter ’Refl’ from the Exclude List 2-2 2.5Process Control through Valuations and Countermeasures . 2-4 2.5.1Control Limits for the ’TrenchOxid-180’ SPC Channel 2-4 2.6Events 2-4 2.7Creating Events 2-5 2.7.1Creating the ’Diffusion’ Event Folder 2-5 2.7.2Creating the Alarm ’Default-Alarm’. 2-5 2.7.3Creating the Corrective Actions 2-5 2.7.4Creating the ’How to’ Trouble Shooting Guide. 2-6 2.8Choosing Valuators and Events for ’TrenchOxid-180’. 2-7 2.9Control Limits and Process Indexes for ’TrenchOxid-180’ 2-8 2.9.1Excluding Invalid Values from Calculations. 2-9 2.9.2Exercise: The Control Limit Calculation Wizard . 2-11 2.10Deleting and Restoring SPC channels 2-11 3Queries and Reporting. 3-1 3.1Targets. 3-1 3.2Basic Terms . 3-1 3.3Reports and Queries. 3-1 3.4Creating Reports 3-2 Contents 2LineWorks SPACE User TrainingRevision 6.1 01 / 2010 3.4.1Preparing the Queries. 3-3 3.4.2Creating the ’Flash-Oxid’ Report Definition 3-4 3.4.3Creating and Displaying a Report with a Free Selection Time. 3-8 4Configuration of SPC Channels, Part II. 4-1 4.1Targets. 4-1 4.2Basic Terms . 4-1 4.3Example Scenario. 4-2 4.4Basic Preparations . 4-2 4.5Creating a Matching Definition 4-3 4.6Using a Matching Definition 4-4 4.7Sub-charts using CKCs 4-6 4.7.1Creating a CKC from the CKC Candidates List 4-6 4.7.2Excluding Data from a Specific Tool. 4-6 4.8Setting up the Prerun and automated creation of CKC 4-7 4.9Valuations in CKC and CKC Overview 4-9 4.10Moving Charts 4-11 4.10.1Setting up Moving Value Charts. 4-11 4.11Attributive Charts . 4-13 4.11.1Setting up Attributive Charts 4-14 4.11.2Attributive Defect Pareto Chart. 4-15 4.11.3Process Indexes and Control Limits with Attributive Charts. 4-16 4.12Dealing with Missing Data – Variable Sample Sizes 4-16 4.13Exporting Samples . 4-17 4.14Comparison of Offline and Online Chart Functions. 4-18 4.15Enhancement . 4-18 4.15.1Importing Sample Data for Matching Scenario. 4-18 5Configuration of Spec Channels. 5-1 5.1Targets. 5-1 5.2Basic Terms . 5-1 5.3Administering Specification Limits in SPACE. 5-1 5.3.1Example Scenario for Spec Channel 5-2 5.3.2Creating a New Spec Channel. 5-3 5.3.3Acceptance Limits 5-4 5.3.4Switching to the Learn Mode . 5-5 6Multiparameter Charts. 6-1 6.1Targets. 6-1 6.2Basic Terms . 6-1 6.3Displaying a Multiparameter Chart 6-1 6.4Exercises 6-2 Contents Revision 6.1 01 / 2010LineWorks SPACE User Training3 6.5MPC Groups. 6-5 6.5.1Exercise for MPC Channel Groups. 6-5 6.5.2Exercise for MPC CKC Groups 6-6 7Calculated Parameters. 7-1 7.1Targets. 7-1 7.2Basic Terms . 7-1 7.3Available Formulas. 7-1 7.4Example for Calculated Characteristics (Difference). 7-2 7.4.1Creating the Calculated Parameter ’FT-Delta’ . 7-2 7.4.2Creating SPC Channels for Trigger and Reference Samples 7-3 7.4.3Creating the SPC Channel ’FT-Delta’. 7-4 7.4.4Navigating from the Calculation Result to the Reference and Trigger Charts 7-4 7.5Example for Calculated Characteristics (Normalization) . 7-4 7.5.1Step 1 – Normalizing the Data. 7-5 7.5.2Step 2 – Specification Limits for a Calculated Parameter 7-6 7.5.3Step 3 – Creating an SPC Channel for the Calculated Parameter. 7-6 8User Administration and Security. 8-1 8.1Targets. 8-1 8.2Basic Terms . 8-1 8.3User Administration 8-1 8.4Start of the User Administration . 8-2 8.4.1Changing the User Password 8-2 8.5The UA Navigator . 8-2 8.6Exercises 8-3 8.6.1Creating Three User Groups 8-3 8.6.2Creating Three Users 8-4 8.6.3Checking the Permissions in UA Navigator. 8-4 8.6.4Working in SPACE Navigator. 8-4 8.6.5Changing the Permissions in UA Navigator. 8-5 8.6.6Permissions for User Administration. 8-5 9Bookmarks and Searches. 9-1 9.1Targets. 9-1 9.2Basic Terms . 9-1 9.3Bookmarks. 9-1 9.4Exercise for Bookmarks . 9-2 9.5Searches 9-3 9.6Exercises for Searches. 9-4 9.6.1Preparation 9-4 9.6.2Sample Search ’Uncommented Violations’ 9-4 9.6.3Sample Search ’Not Accepted Samples’. 9-5 Contents 4LineWorks SPACE User TrainingRevision 6.1 01 / 2010 9.6.4SPC Channel Search for Particular E-Mail Addresses 9-5 9.6.5SPC Channel Search ’All My Channels/CKCs’ 9-5 9.6.6Bookmarks for Searches. 9-5 10Sample History, Visual Setup, Revisions and Pasting Attributes. 10-1 10.1Targets. 10-1 10.2Basic Terms . 10-1 10.3Sample History. 10-1 10.4Visual Setup . 10-2 10.5Revisions . 10-2 10.6Copy then press the Notification Receivers button. 4.In the Notification Receivers dialog, press Add; then click on the new row in Selected Receivers, type an email address, and press OK Folders are associated with an Owner and a Division, which determine the user permissions and visibility of that folder to other users. 5.Switch to the Security tab. 6.Choose the Diffusion division from the Division list. 7.Click the Create and Close button to close the LDS Folder Editor and to create the LDS folder. 1.3.2Creating the ’TrenchOxid-180’ SPC Channel To monitor the oxide film thickness (parameter name ’FT-Oxid’), one chart should be set up for each combination of operation and diffusion furnace. In addition, for each operation, one chart containing the values of all diffusion furnaces should be set up. Since the desired value and the specification limits of the film thickness depend on the opera- tion, it is not reasonable to record samples from different operations in the same chart. Therefore, for each operation, one channel is created in SPACE. ’Operation’ and ’PTool’ are used as extractor keys with a filter value for ’Operation’ and a wildcard for ’PTool’. First an SPC channel for the D0180 operation should be created. Perform the following steps: 1.Select the SPC Channels node in the Diffusion LDS folder. 2.Choose the File / New / SPC Channel command. 3.In the SPC Channel Editor enter the following values: 4.Select the Operation line from the Available Extractor Keys list and transfer it with the button to the Channel Keys and Values list. 5.Enter ’D0180’ in the Key Value column. 6.Select the PTool line from the Available Extractor Keys list and transfer it with the button to the Channel Keys and Values list. 7.In the Key Value column an asterisk ’*’ representing the wildcard appears. 8.Switch to the Settings tab. 9.Select the Include CKC samples to channel check box. This assigns a sample to the chan- nel even if a CKC exists it is assigned to. The remaining settings are inherited from the Inline LDS. Do not assign any additional valuators or events. Channel nameTrenchOxid-180 DescriptionThis is an example. ParameterFT-Oxid Unitnm Example Scenario for a General ApplicationChapter 1 1–4LineWorks SPACE User TrainingRevision 6.1 01 / 2010 10. To close the SPC Channel Editor and to create the SPC channel, choose the Create and Close button. 1.3.3Collecting and Sending Samples In the production line, there are PCs running the SPACE Monitor and the SPACE Input Ser- vice for entering the measurement values. The parameter ’FT-Oxid’ for the current film thickness is collected. The test device supplies single values of ’FT-Oxid’ for 5 sites on the wafer.Production begins to collect these values and a trend chart is displayed. Because there have not been any empir- ical values for the process range at this stage, control limits aren’t available. Preparations 1.To display the entered samples in the charts, start SPACE Monitor. SPACE Monitor is iconized until the first chart has been created. This is done after the first sample has been sent. 2.If your trainer has not done it yet: To collect and send the samples start the Internet Browser and open the SPACE Input Service with //: The SPACE Collector window appears. 3.Select the file for Chapter 1 from your place (LDS). Sending Samples for Parameter ’FT-Oxid’ in Channel ’TrenchOxid-180’ To collect samples for the ’FT-Oxid’ parameter, proceed as follows: 1.Let the shown key values as they are. 2.The shown raw values are randomly generated and can be edited. 3.The specification limits are automatically sent with the sample, with the following (hid- den) values: 4.To send a sample, press the Send button. The sample is sent to the SPACE server and inserted to the SPACE database. In the foot- er, you see the result of the sample sent. In case of a wrong entry you can see one of these symbols at the wrong field: upper188 target180 lower175 Chapter 1Example Scenario for a General Application Revision 6.1 01 / 2010LineWorks SPACE User Training1–5 If a sample is outside the acceptance range: No Channel found: 5.To send a second sample, repeat the procedure with the change, that the key PTool has now the value ’Thermatube-A7’. Now you have sent two samples for the ’FT-Oxid’ parameter. The samples have different PTool key values and different raw values. They have been assigned to the TrenchOxid-180 SPC channel. After sending a sample, a MEAN chart displaying the sample mean values appears in SPACE Monitor. 1.3.4Spec Limit Checks for the SPC Channel ’TrenchOxid-180’ 1.Select the SPC channel ’TrenchOxid-180’ and choose Edit / Properties. 2.Switch to the Valuations you will be prompted to provide a revision comment. 2.6Events Events are used to automatically report out-of-control conditions to the SPACE clients and to propose countermeasures when appropriate. They are triggered as soon as a sample is valu- ated negatively. The events that are triggered in case of a violation can be defined separately for every valuator. The event types ’alarms’, ’corrective actions (CA)’ and ’trouble shooting guides (TSG)’ are available in SPACE Navigator. Alarms are freely definable brief texts which should point out an alerting condition. They can be employed in order to automatically report negative valuations of samples. Mean ValueUCL182 Center180 LCL172 SigmaUCL8 Center4 RangeUCL20 Center8 Creating EventsChapter 2 2–5LineWorks SPACE User TrainingRevision 6.1 01 / 2010 Corrective actions (CA) represent a list of measures in terms of predefined standard texts. The measures contain instructions on how to proceed in the case of an out of limit sample valuation. If the violation of a valuator triggers several CAs, a special SPACE Monitor will be allowed to decide which one of the countermeasures is taken, and stored together with the sample in the SPACE database. Trouble shooting guides (TSG) represent flowcharts in which a diagram of actions can be specified that are to be taken in the case of an out of limit valuation. They are created with a Windows application like VISIO? and are saved as application specific files. To display the TSG files, the SPACE client will use the corresponding application. A list of email addresses can be attached to an event type. When an event is triggered, the defined users automatically receive a notification via email informing them about the viola- tion that has been occurred. On the Charts then create the TrenchOxid-180 SPC channel from the LDS exclude list again. 3.From the LDS exclude list, select all entries and choose the Actions / Create SPC Channel command. 4.In the Create SPC channel window, press the Ok button. 5.In the SPC Channel Editor, enter the channel name ’TrenchOxid-180’. 6.In the parameter unit field, enter nm. 7.In the Channel Keys and Values list, check if the keys Operation and PTool are selected. Remove all other keys. 8.Set the Operation value to ’D0180’ and the PTool value to ’*’. 9.Switch to the Charts switch to this window. If it is not open, select the ’TrenchOxid-180’ SPC channel in the Navigator tree and choose the Actions / Show Offline Charts command. In either case, we will now enable matching. 1.Choose the Edit / Matching. command. 2.From the Select Matching window, choose the matching definition you just created, Pro- cessing Tool. 3.Press the Save as Default button. This will make this matching definition the default matching definition for this SPC channel (you can see that setting in the Settings tab of the SPC channel). In the future, you will only need to press the icon to activate matching using the default matching. 4.Press the Select button to close the Select Matching window. The chart is now showing the trends specific to each of the four process tools used in our sce- nario. 5.Press the icon to deactivate matching and press it again to re-activate matching. The location of the samples was not changed, only the connecting lines changed. There is one line with different style for each unique Process Tool. Now press the icon to sort the matching combinations. Now the samples are re-ordered and all samples belonging to one matching combination are displayed next to each other. Chapter 4Using a Matching Definition Revision 6.1 01 / 2010LineWorks SPACE User Training4–5 6.Click on a sample and note that the corresponding Matching Combination will be high- lighted in boldface in the upper right area. Discussion Each sample is connected to other samples with the same unique value of Process Tool to create what we call a Matching Combination. This is the basis of Matching. In the upper right section of the SPACE Offline Charts window, we have a list of the Matching Combinations according to the unique values of Process Tool. Next to each name is a colored line and a check box. The color is keyed to the chart and the box tells whether this Matching Combina- tion is shown (box checked) or hidden (box open). There are four icons that are specific to matching. The display of specific Matching Combinations can be accomplished by checking the boxes to the right of the color line in the key. The toolbar icons are shortcuts to show/hide all Matching Combinations. IconDescription This icon turns the matching mode on or off. This icon select all available matching combinations. This icon deselects all available matching combinations. This icon sorts the matching combinations. When the matching combinations are sorted, the samples are resorted as well.